Grass-like alumina nanoelectrodes for hierarchical porous silicon supercapacitors
نویسندگان
چکیده
We demonstrate a new kind of conformal nanoelectrode for hierarchical supercapacitors made by ALD. This grass-like alumina (GLA) increases the capacitance PS fourfold or 4× and consists TiN-GLA-TiN stack.
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ژورنال
عنوان ژورنال: Energy advances
سال: 2022
ISSN: ['2753-1457']
DOI: https://doi.org/10.1039/d2ya00177b